中国激光, 2005, 32 (2): 200, 网络出版: 2006-06-01   

衍射光学束匀滑器件的自相关系数与性能参数

Autocorrelation Coefficient and Performance Parameter of Diffractive Optical Element for Beam Smoothing
作者单位
清华大学精密测试技术与仪器国家重点实验室, 北京 100084
摘要
根据衍射光学束匀滑器件透过率函数的自相关系数,重新定义了表征衍射光学器件(DOE)焦面光强分布束匀滑性能的两个参数
Abstract
In this paper, based on the autocorrelation coefficient of the transmittance function of the diffractive optical element (DOE) for beam smoothing, two performance parameters, light efficiency and top non-uniformity, are re-defined. This definition is a kind of approximation of that defined by the spatial frequency spectra of the far filed intensity distribution of the DOE for beam smoothing. The simulated results calculated with two definitions are almost same for the precise designed DOE, but different for the traditional designed DOE. When smoothing by spectral dispersion (SSD) is used with the DOE to realize beam smoothing, the simulated results show that the definition in this paper can reflect the practical performance of the DOE for beam smoothing, no matter whether the DOE for beam smoothing is designed with the precise design method or the traditional design method.

谭峭峰, 严瑛白, 金国藩. 衍射光学束匀滑器件的自相关系数与性能参数[J]. 中国激光, 2005, 32(2): 200. 谭峭峰, 严瑛白, 金国藩. Autocorrelation Coefficient and Performance Parameter of Diffractive Optical Element for Beam Smoothing[J]. Chinese Journal of Lasers, 2005, 32(2): 200.

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