光学学报, 2005, 25 (2): 195, 网络出版: 2006-05-22
高精度检测球面面形的方法研究
Methodological Disquisition of Spherical Fine Metrical Precision
光学测量 绝对测量 干涉图处理 泽尼克多项式 optical measurement absolute calibration disposal of interference pattern Zernike polynomials
摘要
短波光学的迅猛发展和高精密光学仪器的需求日益增多,对高精度表面的加工与检测也随之重要起来。而在一般的干涉检测中,球面镜检测精度主要依赖参考镜的精度。利用Jensen提出的干涉仪绝对校准理论可以去除参考镜的误差和干涉仪的附加波像差,从而提高被测件测量精度。在研究Jensen绝对校准理论的基础上,提出一种利用泽尼克(Zernike)多项式进行波面相位转换的方法进行波面处理,并提出具体实施方案。对面形精度优于λ/37小凸球面进行测量得出了较好的结果,打破了标准镜头最优λ/20的局限,使这一理论简单易行地赋予应用。从而实现了高精度检测球面面形。
Abstract
With developing of shortwave optics and more requirement of lofty precision optical machine, the processing and measurement of fine precision surface are becoming important. But in common interferometry, the metrical precision of spherical surface mainly Sepends on the precision of reference surface. So an absolute calibration method has been described (Jensen in 1973) that is ideally suited to a real-time interferometer to wipe off all additive aberration. Based on the absolute calibration theory a method which rotates the wavefront by using Zernike polynomials is put forward, and detailed projects are given. We get fine precision by measuring surface of small protruding spherical surface with precision above λ/37, and break the localization of standard lens which λ/20 is the best. The method can be used to get fine metrical precision of spherical surface.
阚珊珊, 黄煜, 王淑荣. 高精度检测球面面形的方法研究[J]. 光学学报, 2005, 25(2): 195. 阚珊珊, 黄煜, 王淑荣. Methodological Disquisition of Spherical Fine Metrical Precision[J]. Acta Optica Sinica, 2005, 25(2): 195.