光学学报, 2003, 23 (10): 1241, 网络出版: 2006-06-27
子孔径拼接干涉检测及其精度分析
Principle and Accuracy of the Stitching Interferometer
摘要
介绍了利用小口径干涉仪检测大口径光学元件的方法,从统计的角度出发,详细地推导了子孔径拼接干涉检测技术中拼接参量的具体求解过程,以及使用统计回归方法分析了拼接检测系统精度。并通过实验对该理论进行了实际分析运算。
Abstract
A kind of method is introduced for inspecting the large aperture optics using a small aperture interferometer. The resolving process of the stitching parameter is discussed based on the statistic method. Furthermore the regressive analyzing method has been used in discussing the stitching accuracy. The experiment and the calculation example are given.
张蓉竹, 杨春林, 石琦凯, 许乔, 蔡邦维. 子孔径拼接干涉检测及其精度分析[J]. 光学学报, 2003, 23(10): 1241. 张蓉竹, 杨春林, 石琦凯, 许乔, 蔡邦维. Principle and Accuracy of the Stitching Interferometer[J]. Acta Optica Sinica, 2003, 23(10): 1241.
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