介绍了自行开发的移相式数字波面干涉仪的原理和特点,仪器主要用于激光棒材料波前畸变测试,仪器口径为30 mm,精度优于λ/20,重复性优于λ/50.仪器硬件具有四个特点:变倍、调焦、光通量控制、调整和测试转换;软件包建立在WINDOWS98平台上,进行干涉图采集、处理、波面图形绘制.输出结果形象直观,整个操作简单方便快捷,测试过程26 s.仪器还可测量晶体材料折射率均匀性、晶体元件面形、角度、平行度等.通过测试比对,数据与ZYGO结果一致.

This paper describes the fundamental and performance of a self-developed phase-shifting digital interferometer. This instrument can be used to test wavefront distortion of laser rods whose aperture is 30 mm with accuracy better than λ/20, the repeatability better than λ/50. The instrument has four characters: magnification changing, focusing , luminous flux controlling, and changeover of adjustment and test. Software based on the platform of windows98 can finish interferogram sampling, processing and wavefront drawing, the operation is easy and convenient. The whole testing only spends 26 seconds. This instrument can also measure the refractive-index homogeneity, the flatness, the angle error, the wedge angle of crystal element. By testing the same samples with Zygo GPI-XP, both results were same.