中国激光, 2002, 29 (9): 795, 网络出版: 2006-08-08
一维深亚波长光栅的耦合波分析及偏振特性的研究
Rigorous Coupled-wave Analysis of a New One-dimensional Deep Sub-wavelength Grating
一维深亚波长光栅 严格耦合波分析 偏振特性 one-dimensional deep sub-wavelength grating rigorous coupled-wave analysis (RCWA) polarization
摘要
讨论了一种新的一维深亚波长光栅,其周期结构由等离子体增强化学气相淀积法(PECVD)制备的周期性多层膜构成.简单介绍了这种深亚波长光栅的制作方法.采用严格耦合波分析(RCWA)理论计算了这种一维深亚波长光栅的衍射效率,分析了它的偏振特性.
Abstract
An one-dimensional deep sub-wavelength grating is studied. A new method is developed for this sub-wavelength gratings fabrication. In this method, the grating periods are composed of multilayer films which are obtained by the method of PECVD. The diffractive efficiency of the grating is computed by using rigorous coupled-wave analysis (RCWA). The property of polarization of the grating is also discussed.
袁惠, 周进, 王晓伟, 黄信凡. 一维深亚波长光栅的耦合波分析及偏振特性的研究[J]. 中国激光, 2002, 29(9): 795. 袁惠, 周进, 王晓伟, 黄信凡. Rigorous Coupled-wave Analysis of a New One-dimensional Deep Sub-wavelength Grating[J]. Chinese Journal of Lasers, 2002, 29(9): 795.
PDF全文
