光学学报, 2001, 21 (5): 578, 网络出版: 2006-08-10
半导体激光微小振动实时干涉测量仪
Real-Time Micro-Vibration Measurement with a Laser Diode Interferometer
摘要
设计了一种半导体激光干涉测量仪,可以实时测量物体的微小振动。通过信号处理电路对干涉信号进行分析,得到实际振动的振幅和频率。给出了具体的理论分析。实验结果验证了该干涉仪的实用性。
Abstract
A new laser diode interferometer for micro vibration measurement is proposed. The interferometer can measure micro vibrations of an object in real time. The interference signal is analyzed with signal processing circuits and the amplitude and frequency of vibrations are obtained. The theory analysis is described. The experimental results verify the usefulness of the interferometer.
宋松, 王向朝, 王学锋, 钱锋, 卢洪斌. 半导体激光微小振动实时干涉测量仪[J]. 光学学报, 2001, 21(5): 578. 宋松, 王向朝, 王学锋, 钱锋, 卢洪斌. Real-Time Micro-Vibration Measurement with a Laser Diode Interferometer[J]. Acta Optica Sinica, 2001, 21(5): 578.
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