光学学报, 2002, 22 (1): 118, 网络出版: 2020-08-12
原子力显微镜用于软X射线接触成像的研究
Soft X-Ray Contact Microscopy by an Atomic Force Microscope
摘要
论述了在接触显微成像技术中,后续放大设备对分辨率的影响,并用实验方法比较了采用光学显微镜和原子力显微镜阅读并放大显微图的结果,表明采用原子力显微镜放大显微图是一种较为理想的方法.
Abstract
The instruments for reading relief in the photoresist related with the resolutions of soft X-ray contact microimaging are described. Comparing the micrographs made by an atomic force microscope with that by optical microscopes experimentally, the conclusion can be drawn that the atomic force microscope is a very good method for amplifying the images in the resists.
蒋诗平, 张玉煊, 高鸿奕, 陈建文, 张新夷, 徐至展. 原子力显微镜用于软X射线接触成像的研究[J]. 光学学报, 2002, 22(1): 118. Jiang Shiping, Zhang Yuxuan, Gao Hongyi, Chen Jianwen, Zhang Xinyi, Xu Zhizhan. Soft X-Ray Contact Microscopy by an Atomic Force Microscope[J]. Acta Optica Sinica, 2002, 22(1): 118.
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