光学学报, 2002, 22 (4): 476, 网络出版: 2006-08-08   

用于曲面精密检测的新型光纤三角传感器研究

Research on a Novel Fiber-Optic Triangulation Sensor Used for Surface Precision Measurement
作者单位
1 清华大学电子工程系,北京,100084
2 哈尔滨工业大学自动化测试与控制系,哈尔滨,15001
摘要
基于光纤传感技术和三角测量方法,提出了一种用于曲面检测的新型光纤三角传感器.根据所设计的轮辐式接收光纤结构,可以在测量曲面与传感头间位移时,首先获取被测点处微面元的倾斜信息,以便对传感器测量值进行实时误差修正,从而解决了被测表面倾斜对坐标测量带来的影响.该传感器还能有效地消除环境光干扰、光源波动、表面反射率变化等对测量带来的影响.建立了传感器测量的数学模型.理论分析和初步的实验结果证明了系统的有效性和实用性.该传感器系统不稳定性好于0.3%,横向分辨率好于8 μm,高度分辨率好于0.1 μm.
Abstract
Based on the fiber optic sensor technology and triangulation method, a novel fiber optic triangulation sensor was proposed for surface measurement. According to the spoke like receiving fibers arrangement, the surface slope angle can be obtained as well as the displacement. The obtained slope information can be effectively used to improve the accuracy of the measured coordinate values impacted by slope angle of the measured surface. And measurement errors caused by ambient light fluctuation, intensity disturbance of the light source and reflectance variation can be effectively eliminated. The mathematical model was established. The theoretical analysis and the preliminary experimental results approve the effectivity and practicability of the system and the unstability of the system was better than 0.3%, the lateral and vertical resolutions can reach 8 μm and 0.1 μm, respectively.

赵勇, 刘丽华, 李鹏生, 浦昭邦. 用于曲面精密检测的新型光纤三角传感器研究[J]. 光学学报, 2002, 22(4): 476. 赵勇, 刘丽华, 李鹏生, 浦昭邦. Research on a Novel Fiber-Optic Triangulation Sensor Used for Surface Precision Measurement[J]. Acta Optica Sinica, 2002, 22(4): 476.

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