中国激光, 2004, 31 (6): 659, 网络出版: 2006-06-12
基于微细加工技术的微谐振腔型滤波器
Micro-Cavity Filter Based on MEMS Micro-Fabrication Technology
激光技术 硅模具 微细加工技术 微谐振腔滤波器 laser technique silicon mold micro-fabrication technology micro-cavity filter
摘要
设计了一种新工艺――利用硅微结构直接作为模具来制作微小固体染料激光器谐振腔型滤波器。首先通过组合刻蚀工艺制作硅模具,再利用硅模具复制得到微谐振腔。组合刻蚀工艺是采用深层反应离子刻蚀(deep-RIE)再结合EPW湿法刻蚀(一种各向异性刻蚀技术)。由于EPW湿法刻蚀对〈110〉面刻蚀速率较慢,可制作出具有光学镜面的侧壁〈110〉的硅模具,利用此模具可复制出正方形固态染料微谐振腔。以激光染料若丹明6G掺杂的聚甲基丙烯酸甲脂(PMMA)为工作物质,在调Q Nd∶YAG自倍频激光532 nm抽运下,得到600 nm波长的激光输出。这种谐振腔可应用在染料激光器和滤波器中,对其原理、设计、制作工艺和性能都作了介绍。
Abstract
A novel fabrication technique is designed to obtain silicon crystalline flat planes. The selected silicon crystalline planes 〈110〉 are pre-obtained by deep-RIE, then EPW wet etch is used to remove the roughness after deep-RIE. Through the two etching process, a silicon mold with smooth sidewall can be got. The proposed technique is demonstrated by fabricating a solid polymer dye micro-cavity laser type filter that is replicated by the silicon mold. The experiment of simple filter confirm that the micro-cavity can work well in a filter.
宋康, 李以贵, 陈水良. 基于微细加工技术的微谐振腔型滤波器[J]. 中国激光, 2004, 31(6): 659. 宋康, 李以贵, 陈水良. Micro-Cavity Filter Based on MEMS Micro-Fabrication Technology[J]. Chinese Journal of Lasers, 2004, 31(6): 659.