通过对由比例(P)、积分(I)和微分(D)三个单元组成的PID调节器基本原理的介绍,指出合理设定PID调节器的参数是消除扰动的影响并实现腔镜快速、准确而稳定地移动的关键.实验结果表明,在调腔过程中应用PID技术,提高了静态时谐振腔各腔镜的同心度,而且在一定程度上保证了出光过程中谐振腔内各个腔镜的同心度,使得减小远场光斑的漂移和变形成为可能.

By rudiment introductions of PID regulator, it is indicated that setting parameters of PID regulator reasonably is key to eliminate any stirs and to realize quick, accurate and stable movement of mirrors. Through applications of PID regulator and actuator, it is improved the alignment of the reflecting mirrors in the resonator in the static state and mirrors may be real time aligned in the dynamic state to a certain degree. It is possible that the drift and deformation for COIL output beam spot is reduced.