较大口径、较长脉宽放电抽运准分子激光器是XeCl MOPA系统中的重要环节。介绍了一种双放电结构的X射线预电离激光器,在充电电压50 kV,气分比HCl:Xe:Ne＝1:2.5:2000,气室气压3.546×105 Pa的情况下,获得了稳定的激光输出,激光光束大小为4 cm×5 cm,最大能量2 J。实验发现,为获得均匀的体放电,X射线预电离激光介质的时间和主电极间隙被击穿的时间间隔不能超过500 ns。

A discharge-pumped XeCl excimer laser (PEL) with X-ray preionization was introduced. The capacitance lines were charged pulsed mode, and the energy stored in PFL was transfered to mixture medium by a multi-channel rail switch. As the source of X-ray, the vacuum diode produced X-ray during the time of about 500 ns earlier before the discharge of electrodes. The maximum output energy of 2 J was obtained experimentally with the charging voltage of 50 kV, the gas mixture of HCl:Xe:Ne＝1:2.5:2000, and the pressure of 3.546×105 Pa.