中国激光, 2006, 33 (suppl): 330, 网络出版: 2006-04-21
单层溶胶凝胶化学膜的损伤机理
Mechanism Laser Induced Damage for Sol-Gel Single Layers Optical Coatings
薄膜 溶胶凝胶 损伤机理 损伤形貌 热冲击 热吸收 thin films sol-gel damage mechanism damage appearance thermal shock thermal absorbing
摘要
从单层ZrO2薄膜和单层SiO2薄膜的两种主要损伤形貌出发,分析产生这两种损伤形貌的原因,说明了这两种膜料的单层溶胶－凝胶化学膜损伤机理,即单层ZrO2薄膜的损伤主要由热冲击造成,而单层SiO2薄膜的损伤主要由热吸收造成。还提出了提高这两种膜料的溶胶－凝胶化学膜激光损伤阈值的方法。
Abstract
According to the damage appearances of single layer of ZrO2 and SiO2 thin films, the causing was analyzed. The damage mechanisms of two kinds of materials on sol-gel thin films can be made out that heat shocking leads to the damage of ZrO2 thin film and heat absorption is mostly the damage cause of SiO2 thin films. The method was taken out to improve the damage threshold of two kinds of materials.
黄祖鑫, 蒋晓东, 任寰, 吕海兵, 张磊, 何钱军, 彭勇, 胡晓阳. 单层溶胶凝胶化学膜的损伤机理[J]. 中国激光, 2006, 33(suppl): 330. 黄祖鑫, 蒋晓东, 任寰, 吕海兵, 张磊, 何钱军, 彭勇, 胡晓阳. Mechanism Laser Induced Damage for Sol-Gel Single Layers Optical Coatings[J]. Chinese Journal of Lasers, 2006, 33(suppl): 330.
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