针对微加工薄膜变形镜的交连值很大而且存在多级交连的特性,通过对连续面形变形镜拟合像差原理的理论分析,根据最小二乘原则,以模式法建立了微加工薄膜变形镜的电压解耦模型。测量并用高斯函数拟合了微加工薄膜变形镜的面形影响函数,计算出高斯指数、特征宽度和交连值分布。依据模式法电压解耦模型,实现对前10阶Zernike多项式的拟合并分析了拟合残差。结果表明,模式法可以作为微加工薄膜变形镜的电压解耦模型。为搭建基于微加工薄膜变形镜的自适应光学系统提供了算法支持。

Due to the coupling of micromachined membrane deformable mirror (MMDM) is much larger than that of the common deformable mirror. The voltage-decoupling model for a 37-channel MMDM is established through theoretically and experimentally analyzing the principle of fitting aberration of a continuous-surface deformable mirror. The fitting error for the first 10-order Zernike mode is carried out by means of the measured influence function of and coupling among actuators. The index and width of Gaussian function which is used for fitting the influence function is calculated. The experiment result demonstrate that Zernike mode can be act as the control voltage decoupling algorithm for the adaptive optics system based on MMDM.