红外与激光工程, 2001, 30 (4): 292, 网络出版: 2006-04-28
干涉测量中的自适应抗振技术
Adaptive vibration-resistant techniques in interferometry
自适应抗振技术 振动 光反馈 电光调制 Adaptive vibration-resistant technique Vibration Optical feedback Electro-optical modulation
摘要
环境振动使干涉测量技术的应用受到制约,自适应抗振干涉术是当前消除干涉仪受外界振动影响的有效方法,也是国际上正在研究的热门课题.文中研讨并总结了国际上在这个方面的最新研究成果,并对各种方法的优缺点进行了比较.
Abstract
External vibration can cause error in surface measurement and if it is severe enough the fringes will be completely washed out. Adaptive control to compensate the effects of vibration is an effective method to eliminate external disturbance. In this article, the latest developed methods of adaptive vibration-compensated interferometry are introduced and discussed.
吴新民, 陈进榜, 高志山. 干涉测量中的自适应抗振技术[J]. 红外与激光工程, 2001, 30(4): 292. 吴新民, 陈进榜, 高志山. Adaptive vibration-resistant techniques in interferometry[J]. Infrared and Laser Engineering, 2001, 30(4): 292.
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