集成光学器件已在许多领域得到了应用,对所有的光学器件,光纤与芯片之间的耦合都是一大难题,这是因为耦合的对准精度要求十分严格.常用的耦合方法之一是用精确腐蚀的Si-V型槽作为集成光学器件尾纤耦合时光纤的固定夹具,V型槽的质量直接关系到耦合的成败.探讨了Si-V型槽制作的理论、尺寸设计及工艺.

Integrated optical devices have been used in many areas. For all optical devices, a great challenge is the coupling between fibers and devices, because the alignment tolerances required for coupling is stringent. This is an area that has received much attention. The most common coupling method is to use precision etched Si V groove as the fixture of tail fiber of integrated optical devices. The quality of V groove is essential to the success of the coupling of tail fiber. The theory, design and process about the fabrication of Si V groove is discussed.