红外与毫米波学报, 2003, 22 (1): 45, 网络出版: 2006-05-10   

面阵CCD探测的全自动椭圆偏振光谱系统研究

THE STUDY OF A AUTO ELLIPSOMETER SYSTEM BY USING A TWO-DIMENSIONAL CCD ARRAY DETECTOR
作者单位
复旦大学,光科学与工程系,先进光子学材料和器件国家重点实验室,上海,200433
摘要
给出了一种椭圆偏振光谱的快速测量方法,并使得实验系统的结构更为紧凑和小型化,减轻了重量. 研究中采用了由面阵型CCD探测器和平面多光栅组成的光谱仪,无需光栅扫描,就能够在很短时间内对光谱进行快速准确的数字凝视式成像,光谱分辨精度优于1.0nm,显著提高了系统工作的可靠性和效率. 系统采取了将CCD光谱仪后置的方式,研究并解决了从物理光学原理、器件设计和加工、系统调试和定标、软件编制以及到光谱测量和数据分析等一系列问题,实验中对典型贵金属Au的光学常数谱进行了测量,获得了满意的结果.
Abstract
A new type of CCD ellipsometer was designed and constructed to study the optical properties of materials in 5000~10000 angstrom wavelength range. In the system, the polarizer are driven by a stepping motor that have hollow shafts. The traditional spectroscopic monochromator and photomultiplier were replace by a two-dimensional Si-Based CCD array detector and an integrated grating consisting of three sub-gratings to avoid mechanical transmission, vibration problems and scanning grating entirely. It makes the system simple and reliable, and shorten the time of measurement greatly. The system adopted the technique of arranging CCD Spectrometer at the back. Thus, a series of problems were investigated and solved including the optical principle, instrument design, system calibration, spectra measurement and data analysis. The results from the measured spectra of the complex refractive index for a gold-film sample are presented. It well agrees with the value based on the Drude theory.

游海洋, 贾建虎, 陈剑科, 韩涛, 倪卫明, 王松有, 李晶, 杨月梅, 陈良尧. 面阵CCD探测的全自动椭圆偏振光谱系统研究[J]. 红外与毫米波学报, 2003, 22(1): 45. 游海洋, 贾建虎, 陈剑科, 韩涛, 倪卫明, 王松有, 李晶, 杨月梅, 陈良尧. THE STUDY OF A AUTO ELLIPSOMETER SYSTEM BY USING A TWO-DIMENSIONAL CCD ARRAY DETECTOR[J]. Journal of Infrared and Millimeter Waves, 2003, 22(1): 45.

本文已被 2 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!