强激光与粒子束, 2001, 13 (5): 525, 网络出版: 2006-05-15
单发实验测量软X射线多层膜反射镜反射特性
Single-shot measurement of soft X-ray Mo/Si multi-layer mirror reflectance
摘要
提出了一种单发实验测量软X射线波段多层膜反射镜反射特性的简易方法。实验采用激光等离子体软X射线源作为光源,用平焦场光栅谱仪分光,在光路中引入掠入射镜以消除高级次谱的影响,用软X光CCD记录,在一发激光打靶实验中,测量了设计中心波长为13.9nm的Mo/Si多层膜反射镜的反射特性。
Abstract
A new method of single shot measurement of normal incidence soft X ray Mo/Si multilayer mirror's reflectance was proposed.Experiment were performed using laser produced plasma X ray source,flat field grating spectrometer and soft X ray CCD.Grazing incident mirror was employed to eliminate high order contribution.Wavelength was accurately determined by the 17.04nm L edge of Al filter.Measurements of Mo/Si multilayer mirror showed a peak reflectance of 35% at 14nm with a 0.5nm bandwidth.
王伟, 倪元龙, 万炳根, 孙今人, 吴江, 王琛, 孙玉琴, 周关林, 顾援, 王世绩. 单发实验测量软X射线多层膜反射镜反射特性[J]. 强激光与粒子束, 2001, 13(5): 525. 王伟, 倪元龙, 万炳根, 孙今人, 吴江, 王琛, 孙玉琴, 周关林, 顾援, 王世绩. Single-shot measurement of soft X-ray Mo/Si multi-layer mirror reflectance[J]. High Power Laser and Particle Beams, 2001, 13(5): 525.
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