在交叉分子束装置上，进行了F原子与硅烷分子反应的可见化学发光实验研究，观察到了HF基电子态(3,0)、(4,0)、(5,1)、(6,2)振动跃迁和SiF(A-X)，SiH(A-X)的发射光谱。对SiF(A-X)的光谱进行了计算机模拟，得到了它的相对振动布居。依据产物光谱强度随反应压力的变化，对F原子与硅烷分子反应动力学过程进行了分析，结果表明反应经历了一个F原子逐级脱去硅烷中氢原子的过程。

By using crossedmolecular beam apparatus, the visible chemiluminescence spectrum were investigated for thereaction F atoms with silane. The emission spectra of HF(3,0)、(4,0)、(5,1)、(6,2)，SiF(A-X) and Si(A-X) transitionwere observed. The relative vibrational state distribution of SiF(A) were obtained by thecomputer simulation. Experimental results indicated that the reaction F with silaneproceeds via a consecutive hydrogen-stripping process.