应用光学, 2004, 25 (5): 62, 网络出版: 2006-05-19
光学非球面器件检测新方法探究
Simulation Calculation of Measuring Optical Aspheric Surface Based on Light Pattern Projection
光学检测 非球面器件 理论计算 模拟计算 optical check aspheric surface device theoretical calculation simulation calculation
摘要
阐述了光学投影式检测非球面的基本原理．提出了利用计算机模拟光学检测过程的方法．明确了计算机模拟的目的及可达到的目标。在模拟过程中．选取了适合非球面的参考球面．利用光学基本理论和数学推导进行了理论分析及精密计算，得出非球面和参考球面的垂轴距离与接收屏上的待测距离的计算公式。根据理论计算公式．利用计算机C语言编程，对垂轴距离用于计算机进行了模拟．并利用excel制表作图．做出了非球面的模拟曲线．得到了和理论结果相符的模拟效果．模拟的精度达到±0．OO1μm。
Abstract
In this thesis,the fundamental of optical projection measurement for aspheric sureface is explained,the simulation calculation with computer is put forward and the aim of simulation is defind.We choose the reference sphere fitting into asphere,educed the calculation expressions of the vertical axis distance and measured the distance in the reception screen according to the optical theory and math formula.And also we simulated the vertical axis distanced with C Programme and obtained the simulation asphere curve using excel.The simulation caculation result is in accordiance with the theoretical calculation and meets the accuracy of +0.001um.
段存丽, 田爱玲, 陈志超. 光学非球面器件检测新方法探究[J]. 应用光学, 2004, 25(5): 62. 段存丽, 田爱玲, 陈志超. Simulation Calculation of Measuring Optical Aspheric Surface Based on Light Pattern Projection[J]. Journal of Applied Optics, 2004, 25(5): 62.
PDF全文
