光子学报, 2005, 34 (11): 1639, 网络出版: 2006-06-12
用按需滴定技术制备聚合物微透镜阵列
Preparation of Polymer Microlenses Array by using Drop-on-Demand Technology
按需滴定-原位热聚合 聚合物微透镜阵列 表面粗糙度 聚甲基丙烯酸甲酯 Drop-on-Demand and in-situ thermal polymerization Polymer microlenses arrays Surface roughness PMMA
摘要
采用高分子聚合物-单体混合溶液按需滴定-原位热聚合的新方法制作折射微透镜及其阵列.制备透镜的主要材料是甲基丙烯酸甲酯及其聚合物.制备的微透镜直径在1 mm～3 mm范围内,矢高为100 μm～400 μm,透镜焦距在1 mm～4 mm之间.所得微透镜在波长λ=1.55 μm处有很好的光学透过率(90%),适于作光通信耦合器件.用AFM-Ⅱ型原子力显微镜测得微透镜阵列的表面粗糙度Ra约等于0.9 nm,并通过液体的表面张力理论分析了微透镜的形成机理.
Abstract
High-quality refractive microlens and microlens array have been fabricated using drop-on-demand and in-situ thermal polymerization technology with polymer PMMA and its monomer MMA.Microlenses diameters and heights range from d=1 mm to 3 mm,and h=100 μm to 400 μm,respectively.A focal length ranges from 1mm to 4 mm approximately.All the components have high optical transparency(90%)at the wavelength of 1.55 μm to be suitable for optical communication coupled devices.The surface roughness of microlens is measured by an atomic force microscope(AFM-Ⅱ).Micro-lens forming mechanics has been analyzed by surface tension theory.
张玉虹, 康利军, 胡宝文, 王丽莉, 李同海, 李育林. 用按需滴定技术制备聚合物微透镜阵列[J]. 光子学报, 2005, 34(11): 1639. 张玉虹, 康利军, 胡宝文, 王丽莉, 李同海, 李育林. Preparation of Polymer Microlenses Array by using Drop-on-Demand Technology[J]. ACTA PHOTONICA SINICA, 2005, 34(11): 1639.
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