基准平面的确立,是进行表面参数评定的基础;建立理想的基准平面,在几何量形位公差检测及相关工程测量方面具有重要作用.为了建立高精度的激光扫描基准平面,对扫描平面形成过程中光束的传播进行了详细分析;根据光学矢量反射定律,推导出了扫描误差的理论公式;在此基础上揭示了误差补偿的基本原理,导出了用于补偿扫描机构产生的扫描误差的理论公式;提出了据此准则进行设计的扫描机构的模型.分析表明,用激光及其扫描装置建立光学基准面时,扫描误差是不可避免的,这种误差不加补偿,则最终将引入基准光学平面影响基准精度,进而降低参数的评定精度;借助于所推导的误差补偿公式,是可以补偿这种误差的,这对于建立高精度的扫描基准平面具有理论指导意义.

Establishing datum plane is the base assessing surface parameter. It is important to set up perfect datum plane in engineering measurement as well as geometry parameters′ shape and positional error inspection. In order to establish high precision laser scanning plane, the laser beam transmission is anatomized in the formation of the scanning plane. Based on the vector law of refection in optics, the scanning error′s academic formula is educed. The essential principle on the error compensation is given. The academic formula is educed which is used to compensate the error of the scanning equipment. According to the academic formula, the model of the scanning equipment is designed. The analysis indicates that when the plane is set up by means of laser scanning equipment, scanning error is unavoidable; if the error were not compensated, it would come into the datum optical plane and would influence on the accuracy of the datum plane, thereby the parameter evaluation accuracy would be played down; by means of the