基于离子交换波导的集成型器件是氢敏传感器中很有发展潜力的一种.传感区域由离子交换波导及其表面的金属钯膜组成,通过有限差分法(FDM)计算了这种波导结构中的导模及表面等离子模的模场分布,分析了其传播特性与钯膜光学常数的关系,并结合束传播方法(BPM)对钯膜的厚度进行了优化,使其具有最高的灵敏度.

A hydrogen sensor based on integrated optical waveguide structure is one of the most promising types of the field. The sensor region of the waveguide is covered with a thin palladium layer whose optical constants are influenced by concentration of hydrogen in surrounding medium. A finite difference method (FDM) is used to calculate the field distribution of the structure. The relationship between the waveguide property and the optical constants of the palladium layer is analyzed. The output power of the structure is calculated by an BPM program and an optimal thickness is obtained to achieve maximum sensitivity.