光电子技术, 2002, 22 (3): 141, 网络出版: 2006-06-08
硫化镉薄膜的XPS研究
X-ray Photoelectron Spectroscopy of Cadmium Sulfide Thin Films
摘要
用XPS分析了CdS薄膜的结构.硫化镉薄膜是用化学沉积法制备的胶体颗粒,然后再通过真空蒸发法在平面玻璃上形成的多晶薄膜.XPS分析表明CdS薄膜中的Cd3d和S2p峰值均比块状CdS向高能方向偏移了10 eV.这主要是由于表面效应所致.
Abstract
In this paper, the structure of CdS thin films was analyzed by XPS. The CdS grains were firstly prepared by CBD, then polycrystalline thin films of CdS were formed on the plane glass by vacuum evaporation. The XPS analysis showed that the values of Cd3d and S2p peak for films were shifted towards high energy, and greater than 10 eV as compared with the body CdS. This can be ascribed to the surface effect of CdS thin films.
刘高斌, 郭江, 冯庆, 刘亚静, 王万录, 廖克俊. 硫化镉薄膜的XPS研究[J]. 光电子技术, 2002, 22(3): 141. 刘高斌, 郭江, 冯庆, 刘亚静, 王万录, 廖克俊. X-ray Photoelectron Spectroscopy of Cadmium Sulfide Thin Films[J]. Optoelectronic Technology, 2002, 22(3): 141.