激光与光电子学进展, 2003, 40 (7): 20, 网络出版: 2006-06-27
激光纳米尺度先进加工技术 下载: 742次
Advanced Laser Material Nanoprocessing Techniques
摘要
综述了激光-扫描探针显微镜(Laser-sPM)纳米尺度加工先进技术及激光纳米结构先进加工技术.
Abstract
The advanced technology of laser-scanning probe microscope (SPM) nanoprocessing is presented and some other laser nanoprossessing techniques is concerned as well.
黄英奇, 程兆谷, 谌巍, 赵全忠, 高海军, 柴雄良. 激光纳米尺度先进加工技术[J]. 激光与光电子学进展, 2003, 40(7): 20. 黄英奇, 程兆谷, 谌巍, 赵全忠, 高海军, 柴雄良. Advanced Laser Material Nanoprocessing Techniques[J]. Laser & Optoelectronics Progress, 2003, 40(7): 20.