Chinese Journal of Lasers B, 1999, 8 (1): 34, 网络出版: 2006-08-08  

Phase Measurement Algorithm without Phase-unwrapping Problem for Phase-stepping interferometry

Phase Measurement Algorithm without Phase-unwrapping Problem for Phase-stepping interferometry
作者单位
1 Department of Communication Engineering, Shanghai University (Jiading Campus),Shanghai 201800, China
2 Department of Mechanical Engineering, Shanghai University (Jiading Campus),Shanghai 201800, China
3 Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences,Shanghai 201800, China
摘要
Abstract
A new phase measurement algorithm without phase-unwrapping problem is presented. It is mainly applied in the interferograms of few and straight fringes with noise and corrupted regions. Existing phase-unwrapping algorithms for those interferograms are trivial and time consuming. The new algorithm first searches N “seeding pixels” in the interferograms, then the interograms segmented into N parts by the “seeding pixels”. The adjacent “seeding pixels” phase difference is limited in the range of [-π,π]. Because the phase measurement is relative, one can assume that one of the “seeding pixels” phase is a constant, and other “seeding pixels” phases can be easily obtained by the phase-stepping algorithm. Moreover, other pixels phases in the interferograms can be determined through the simple operation with the “seeding pixels” phases by means of the phase-stepping algorithm. A smooth flat mirror was measured in a Linnik interference microscope with phase-stepping interferometry. The interferograms were corrupted with many dirty spots or regions. The experimental results confirm that our new algorithm is fast and robust.

WEI Chunlong, CHEN Mingyi, HOU Weidong, WANG Zhijiang. Phase Measurement Algorithm without Phase-unwrapping Problem for Phase-stepping interferometry[J]. Chinese Journal of Lasers B, 1999, 8(1): 34. WEI Chunlong, CHEN Mingyi, HOU Weidong, WANG Zhijiang. Phase Measurement Algorithm without Phase-unwrapping Problem for Phase-stepping interferometry[J]. 中国激光(英文版), 1999, 8(1): 34.

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