Chinese Journal of Lasers B, 2002, 11 (5): 356, 网络出版: 2006-08-08  

Technique for Monolithic Fabrication of Microlens Arrays Integrated with Infrared CCD

Technique for Monolithic Fabrication of Microlens Arrays Integrated with Infrared CCD
作者单位
1 Dept. of Optoelectronic Engineering, Huazhong University of Science and Technology, Wuhan 430074, China
2 State Key Laboratory for Image Information & Intelligence Control,Huazhong University of Science and Technology, Wuhan 430074, China
3 The National Key Laboratory for Laser Technology, Huazhong University of Science and Technology, Wuhan 430074, China
摘要
Abstract
Based on scalar diffraction theory, 8-phase-level 256×256 elements diffractive microlens array with element dimension of 50×33 μm2 have been fabricated on the back-side of PtSi(3~5 μm) infrared CCD. The measurement results indicated that the ratio of the signal-to-noise of the infrared CCD with microlens was increased by a factor of 2.8.

陈四海, 易新建, 王宏臣, 何苗. Technique for Monolithic Fabrication of Microlens Arrays Integrated with Infrared CCD[J]. Chinese Journal of Lasers B, 2002, 11(5): 356. CHEN Sihai, YI Xinjian, WANG Hongchen, HE Miao. Technique for Monolithic Fabrication of Microlens Arrays Integrated with Infrared CCD[J]. 中国激光(英文版), 2002, 11(5): 356.

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