中国激光, 1999, 26 (12): 1127, 网络出版: 2006-08-09
常用材料软X射线多层膜的全波段设计
Theoretic Design of Multilayers for Soft X-rays (1～30 nm)
摘要
利用薄膜光学理论及材料在软X射线波段的原子散射因子,设计了大批量的软X射线多层膜的计算程序,对常用材料的膜系配对进行了优化设计,给出的结果对软X射线整个波段内的多层膜膜系的选择有一定的指导意义。
Abstract
A theoretic design and results of the soft X-ray multilayers are reported for the whole soft X-ray wavelength region. The optimal multilayers and their structures are predicted for different wavelengths.
邵建达, 易葵, 范正修, 王润文. 常用材料软X射线多层膜的全波段设计[J]. 中国激光, 1999, 26(12): 1127. 邵建达, 易葵, 范正修, 王润文. Theoretic Design of Multilayers for Soft X-rays (1～30 nm)[J]. Chinese Journal of Lasers, 1999, 26(12): 1127.
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