光学学报, 1999, 19 (11): 1581, 网络出版: 2006-08-09
半导体光电探测器响应度测试装置的研制
A Device for Testing Spectral Responsivity of Semiconductor Photodetector
相对光谱响应度 绝对光谱响应度 量子效率 单色仪 relative spectral response absolute spectral response quantum efficiency monochromater
摘要
分析了半导体光电探测器光谱响应度的测试原理;研制了一套波长为0.4~1.1μm的光谱响应度测试装置。该装置采用双光路替代法,可以测试绝对光谱响应度、相对光谱响应度和量子效率,并可减小光源不稳定性对测试结果的影响,最终给出了测试结果比对。
Abstract
The testing of spectral responsivity of semiconductor photo detector is discussed. A device used for testing spectral responsivity with wavelength ranged from 0.4~1.1 μm is developed. It can be used to test relative spectral responsivity, absolute spectral responsivity and quantum efficiency, and the effect of instability of source can be eliminated. The testing results are compared.
刘晖, 朱日宏, 朱煜, 陈进榜. 半导体光电探测器响应度测试装置的研制[J]. 光学学报, 1999, 19(11): 1581. 刘晖, 朱日宏, 朱煜, 陈进榜. A Device for Testing Spectral Responsivity of Semiconductor Photodetector[J]. Acta Optica Sinica, 1999, 19(11): 1581.