中国激光, 2000, 27 (4): 327, 网络出版: 2006-08-09
波面功率谱密度中频波段的干涉测试研究
Interferometric Test of Power Spectral Density in Spatial Mid-frequency Band of the Wavefront
摘要
讨论了干涉测试表面功率谱密度(PSD)的移相式数字波面干涉仪需注意的问题，即如何保持严格相干性；引起波面测量误差的干涉场杂纹消除的原理和方法；干涉仪频响特性的标定等。
Abstract
In this paper, some problems about development of the phase-shifting laser interferometer for testing power spectral density (PSD) are discussed, for example, strictly coherence of sources; the principle and method to deduce wavefront error due to stray-light fringe pattern; calibration of frequency response function for interferometer.
高志山, 陈进榜, 何勇, 张国安, 吴新民. 波面功率谱密度中频波段的干涉测试研究[J]. 中国激光, 2000, 27(4): 327. 高志山, 陈进榜, 何勇, 张国安, 吴新民. Interferometric Test of Power Spectral Density in Spatial Mid-frequency Band of the Wavefront[J]. Chinese Journal of Lasers, 2000, 27(4): 327.
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