中国激光, 2000, 27 (4): 367, 网络出版: 2006-08-09
光热调制激光波长测量物体的微小振动
Photothermal Modulation of Laser Diode Wavelength for Measuring Microvibrations
半导体激光器 光热效应 干涉仪 光学检测 纳米测量 laser diode photothermal effect interferometer optical testing nanometer measurement
摘要
提出了一种新型半导体激光正弦相位调制干涉仪。使用此干涉仪测量了物体的微小振动。利用光热效应调制光源波长降低了光源光强变化引起的测量误差。模拟计算和实验结果证明了此干涉仪的有用性。
Abstract
A novel sinusoidal phase-modulating (SPM) laser-diode interferometer, which can be used to measure microvibrations with a high accuracy, is reported. In this paper, the photothermal wavelength modulation of a laser diode is employed in SPM interferometer to decrease the measurement errors caused by light-intensity changes. The computer simulations and experiments verify the usefulness of the interferometer.
王学锋, 王向朝, 钱锋, 陈刚, 卢洪斌, 陈高庭, 方祖捷. 光热调制激光波长测量物体的微小振动[J]. 中国激光, 2000, 27(4): 367. 王学锋, 王向朝, 钱锋, 陈刚, 卢洪斌, 陈高庭, 方祖捷. Photothermal Modulation of Laser Diode Wavelength for Measuring Microvibrations[J]. Chinese Journal of Lasers, 2000, 27(4): 367.