光学学报, 2000, 20 (3): 384, 网络出版: 2006-08-09
光纤共焦扫描显微术用于光盘盘基预刻槽结构的检测
Fiber Confocal Scanning Microscopy for the Measurement of Optical Disk Pregrooves
光盘盘基预刻槽结构 光纤共焦扫描显微术 纵向响应 边缘判据 optical disk pre-groove fiber confocal scanning microscopy axial response edge criteria.
摘要
基于共焦扫描差分术, 提出了检测不同表面反射率的物体表面形貌的方法, 并提出了在光纤共焦扫描成像术中利用边缘判据进行边缘定位的极限尺度。上述思想用于检测光盘盘基预刻槽形结构, 在建立的一套光纤共焦扫描成像装置上进行了光盘盘基预刻槽结构的检测, 获得了槽宽、 槽间距及槽深等实验数据, 与槽标准参数相符。
Abstract
A new surface measurement method for an object with different reflection is demonstrated based on differential confocal microscopy. The limit ranges of edge positioning is proposed while using edge criteria in fiber confocal scanning microscopy. As application, the optical disk pre-groove is measured by using fiber optical confocal scanning imaging system. The gray image and cross-section profile with groove width, depth and pitch are given. The experimental results are in good agreement with the reference data.
杨莉松, 王桂英, 王建岗, 徐至展. 光纤共焦扫描显微术用于光盘盘基预刻槽结构的检测[J]. 光学学报, 2000, 20(3): 384. 杨莉松, 王桂英, 王建岗, 徐至展. Fiber Confocal Scanning Microscopy for the Measurement of Optical Disk Pregrooves[J]. Acta Optica Sinica, 2000, 20(3): 384.