Chinese Journal of Lasers B, 2001, 10 (3): 211, 网络出版: 2006-08-10
Fiber-optic Based Scanning Confocal Microscopic Interferometer for the Measurement of Surface Topography
摘要
Abstract
A fiber-optic based scanning confocal microscopic interferometer with digital feedback is developed for the precise measurement of the surface topography on a large-scale object of complex shape with steep surface slopes. Theoretical analysis on interference formation demonstrates the confocal characteristic of the proposed interferometer along its measurement path. Experimental results confirm the spatial resolution of the measuring system to be within 1 μm and the measurement accuracy to be better than 5 nm.
DING Zhihua, LIU Yu, BAO Zhengkang, LAI Guanming. Fiber-optic Based Scanning Confocal Microscopic Interferometer for the Measurement of Surface Topography[J]. Chinese Journal of Lasers B, 2001, 10(3): 211. DING Zhihua, LIU Yu, BAO Zhengkang, LAI Guanming. [J]. 中国激光(英文版), 2001, 10(3): 211.