中国激光, 1998, 25 (4): 309, 网络出版: 2006-10-18
不连续金属薄膜对短波长软X射线多层膜反射特性的影响
The Reflection Performances of Soft X ray Multilayers for the Shorter Wavelengths with Discontinuous Metal Layers
摘要
讨论了不连续金属薄膜对软X射线多层膜反射特性的影响。给出了理论模型,具体计算了在短波段的软X射线多层膜反射率与不连续金属岛状膜在基底表面覆盖率之间的关系,修正了文献中的评估方法,并建立了新的定性评估包含不连续金属膜层的软X射线多层膜光学特性分析模型。
Abstract
This paper discuss the reflection performances of soft X ray multilayers for the shorter wavelengths with discontinuous metal layers. The theoretical models give out the relationships between the reflectivity and the fractional coverage of a discontinuous metal layer over the substrate. The results show that a model presented previously should be revised and a new analysis model is established.
邵建达, 易葵, 范正修, 王润文, 袁利祥. 不连续金属薄膜对短波长软X射线多层膜反射特性的影响[J]. 中国激光, 1998, 25(4): 309. 邵建达, 易葵, 范正修, 王润文, 袁利祥. The Reflection Performances of Soft X ray Multilayers for the Shorter Wavelengths with Discontinuous Metal Layers[J]. Chinese Journal of Lasers, 1998, 25(4): 309.