中国激光, 1998, 25 (6): 565, 网络出版: 2006-10-18
45°角入射的13.1nm软X射线多层膜的研制
Deposition and Absolute Reflectivity Measurements of a Mo/Si Multilayer for 13.1 nm Soft X ray at 45° Incidence Angle
摘要
报道了对45°入射角高反的13.1 nm软X射线多层膜反射镜的研制情况。利用在星光装置中进行的软X射线激光等离子体实验测量多层膜反射率的方法, 获得了26.2%的实测反射率, 该反射率已达到理论反射率的70%。
Abstract
Reported here is a result of absolute reflectivity measurement carried out in a soft X-ray laser plasma experiment. A 26.2% reflectivity Mo/Si multilayer for 13.1 nm soft X-ray at the 45° incidence angle is obtained.
邵建达, 易葵, 范正修, 王润文, 袁利祥. 45°角入射的13.1nm软X射线多层膜的研制[J]. 中国激光, 1998, 25(6): 565. 邵建达, 易葵, 范正修, 王润文, 袁利祥. Deposition and Absolute Reflectivity Measurements of a Mo/Si Multilayer for 13.1 nm Soft X ray at 45° Incidence Angle[J]. Chinese Journal of Lasers, 1998, 25(6): 565.
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