中国激光, 1998, 25 (3): 220, 网络出版: 2006-10-18
采用聚四氟乙烯板表面预电离放电激发XeF准分子紫外发射谱
XeF Excimer UV Emission Spectrum Excited by Discharge with Surface Preionization over the Teflon Plate
无外加氟施主 表面预电离 准分子发射谱 without additional fluorine donor gas surface preionization excimer emission spectrum
摘要
无外加氟施主情况下,在装有聚四氟乙烯面预电离板的准分子激光器中,放电激发Xe/Ne混合气体产生了XeF准分子。研究了中心波长为351 nm,353 nm和308 nm的发射谱。放电激发Kr/Ne混合气体,观察到了KrF 248 nm发射谱。
Abstract
The XeF excimer is formed in an excimer laser with surface preionization along a Teflon plate by discharge excitation of a Xe/Ne mixture without additional fluorine donor gases. Emission spectra at central wavelengths 351, 353 and 308 nm are studied. The KrF fluorescence spectrum at 248 nm is observed when a Kr/Ne mixture is excited.
李昌勇, 马树森, 秦玉英, 张兆平, 胡天舒. 采用聚四氟乙烯板表面预电离放电激发XeF准分子紫外发射谱[J]. 中国激光, 1998, 25(3): 220. 李昌勇, 马树森, 秦玉英, 张兆平, 胡天舒. XeF Excimer UV Emission Spectrum Excited by Discharge with Surface Preionization over the Teflon Plate[J]. Chinese Journal of Lasers, 1998, 25(3): 220.