以典型的基于MEMS的FP腔结构为例，用传输矩阵方法推导了考虑反射相移的半峰全宽的解析表达式．利用此解析表达式分别模拟了考虑反射相移的半峰全宽与干涉级次和FP腔两反射镜间距的关系，并将其与不考虑反射相移的半峰全宽进行了对比；同时将反射相移和反射率对半峰全宽的影响进行了比较分析．

Analytic expression with the effect of phase shift on reflection for full width of maximum height of a typical MEMS-based FP cavity is deduced by transfer matrix method. The relationship between full width of maximum height and interference order is simulated with the analytic expression,so does the relationship between full width of maximum height and the gap of the two reflectors. And the result is compared with full width of maximum height without considering phase shift on reflection. The effects on full width of maximum height caused by phase shift on reflection and reflection index respectively are discussed too.