利用有机无机混合的溶胶凝胶方法在硅基底上制备波导薄膜．采用正硅酸四乙酯和苯基三乙氧基硅烷作为反应先驱物，利用旋涂的方法成膜，对其折射率，传输损耗以及条形波导的光刻、刻蚀特性进行了研究．测量了波导薄膜折射率随成分变化的关系．实验表明，该方法工艺简单，可以获得具有较低损耗的波导薄膜．测试得到632．8nm波段的损耗系数为0．23dB／cm．采用ICP刻蚀工艺获得了较为平整的条形波导．

An organic-inorganic hybrid sol-gel material by using Tetraethylorthosilicate (Teos) and phenyltriethoxysilane(Phtes) as precursors was synthesized,and a planar optical waveguide was fabricated by using spin-coating on silicon substrate. A rib strip waveguide was formed by inductively coupled plasma(ICP). A relation between refractive index and composition of the precursors was obtained by M-line method;the optical loss of the planar waveguide was measured to be 0.23 dB/cm at 632.8 nm wavelength.