以压电陶瓷(PZT)微位移器为主要研究对象，引入一种处理静态干涉图的新方法——虚光栅移相叠栅条纹法，设计实验对一台实际使用的移相器微位移旋转误差进行测试研究，对其引起的波面旋转情况进行了定量的计算分析，并给出测试结果．用虚光栅移相叠栅条纹法处理实验中加有载频的干涉图时，不需要使用任何移相器件，可以进行动态位相的检测，整个移相过程用计算机进行控制，避免了引入额外的移相误差．

Based on the theory of linear polynomial fitting algorithm,the micro-displacement error of phase-shifter which can induce the rotation of fringes in the processing of phase shift is analyzed. A novel method for static interferogram analysis,named the virtual grating phase-shifting moiré fringe method that is based on virtual grating technology,phase-shifting interferometry and moiré technology,is introduced and analyzed. When the static interferogram with a certain spatial frequency in the experiment is processed by this method,the phase shift is introduced mathematically and controlled by the computer to avoid any phase-shifting error,so the dynamic phase could be evaluated. Some valuable experiments are carried out and the results are presented to show the feasibility of this error-analysis method. In terms of error analysis,the criterions to control the error are presented.