光学学报, 1997, 17 (4): 385, 网络出版: 2006-10-31
自注入式可变短脉冲准分子激光器的理论分析
Theoretical Study on a Self Injected Excimer Laser with Continuous Tunable Output Short Pulses
摘要
给出自注入式可变短脉冲准分子激光器运转和设计的理论基础。研究了其运行特征,设计和分析了一般商用器件实现运转要求具有的基本参数条件和实现可能。分析结果与国外最新实验结果具有较好的一致性,可用于指导器件的设计和实验、以及作为确定改善方向的基础。
Abstract
We presents a theoretical analysis on a self injected excimer laser (SIEL) with 1～10 ns continuous width tunable pulses output from a typical commercial excimer laser. The operational characteristics and the basic requirements were given. The results agree with the recent published experimental results of SIEL.
向世清, 楼祺洪. 自注入式可变短脉冲准分子激光器的理论分析[J]. 光学学报, 1997, 17(4): 385. 向世清, 楼祺洪. Theoretical Study on a Self Injected Excimer Laser with Continuous Tunable Output Short Pulses[J]. Acta Optica Sinica, 1997, 17(4): 385.
PDF全文
