结合国内外激光薄膜加工研究结果，从激光与物质相互作用的角度出发，建立激光切割硅薄膜太阳能电池的柱面坐标理论模型。利用Monte Carlo法求得多层薄膜结构的光场分布，进一步用有限元法(finite element method，FEM)求得柱面坐标下热平衡方程的数值解。得出了能量密度、脉冲形状、重复频率、光斑形状与切割速度以及切割质量之间的关系。

An optical-thermal model in cylindrical coordinate of pulsed laser scribing multi-layer thin film solar cell module is established. Monte Carlo method is employed to obtain the light fluencies rate of multi-layer material. Finite element method(FEM)is used to solve the heat equation in cylindrical coordinate. And the connection of the laser energy density,repeatition frequency,the shape of pulse and facula,scribing rate and scribing quality is obtained.