激光与光电子学进展, 2006, 43 (11): 43, 网络出版: 2006-11-20
同步移相抗振光干涉测量技术研究进展
Development of Anti-Vibration Technology in Simultaneous Phase-Shifting Interferometry
摘要
从移相单元分光以及相移形成角度对同步移相干涉光抗振技术的研究进展做了综述,分析了影响该技术的关键问题,对光干涉测试领域相关研究具有一定指导的推进作用。
Abstract
The researching progress of simultaneous phase-shifting interferometry (SPSI) is summarized, from the angles of phase-shifting units splitting and phase interval production. And the key knots affecting the SPSI is reviewed. It is expected to prompt the research in the interferometry related fields.
左芬, 陈磊. 同步移相抗振光干涉测量技术研究进展[J]. 激光与光电子学进展, 2006, 43(11): 43. 左芬, 陈磊. Development of Anti-Vibration Technology in Simultaneous Phase-Shifting Interferometry[J]. Laser & Optoelectronics Progress, 2006, 43(11): 43.