在矩形光栅上镀制软Ｘ射线多层膜，得到多层膜光栅组合式结构。报道用CuKα线小角度对多层膜光栅的衍射特性研究结果。用Ｘ射线运动学理论进行了理论分析，得到两个衍射条件，分别对应于决定衍射角的光栅方程和决定多层膜峰值的布拉格定理，发现光栅级效率受多层膜反射调制。对镜面反射扫描、样品扫描、探测器扫描不同情况下各衍射峰峰位和强度的实验值和理论进行了比较，两者符合得很好。

The multilayer grating combined structure can be obtained by depositing the soft X ray multilayer on the laminar grating. In this paper, we report the diffraction performance of the multilayer grating under the irradiation of Cu K α X ray at low angle. Analysing with X ray kinematics theory we obtained two diffraction conditions, corresponding to the grating equation and Bragg law respectively. The efficiencies of grating were found to be modulated by the multilayer reflection. The values both of experiment and theory of diffraction peak positions and intensities are compared and analyzed under three different scan methods such as specular reflection scan, sample scan and detector scan. The results show that they are coincided well.