激光与光电子学进展, 1996, 33 (1): 1, 网络出版: 2006-12-04
非晶态有机聚合物薄膜脉冲激光沉积
Pulsed laser deposition of non-crystal organic polymer
摘要
非晶态有机聚合物薄膜具有低介电常数，高强度等优良物理特性，在微电子工业领域有着潜在的应用价值而引起人们极大兴趣，本文就其沉积方法及沉积机制进行简要综述，并展望了其应用前景。
Abstract
Non-crystal organic polymers, such as Teflon etc,have novel physical properties,which are low dielectric constant,high strength.It is of considerable interest from potential application in microelectronics industy.This paper reviews deposition method and deposition mechanism of the film.The prospect of the film application is looked ahead.
张兵临, 马会中, 张兰. 非晶态有机聚合物薄膜脉冲激光沉积[J]. 激光与光电子学进展, 1996, 33(1): 1. 张兵临, 马会中, 张兰. Pulsed laser deposition of non-crystal organic polymer[J]. Laser & Optoelectronics Progress, 1996, 33(1): 1.
PDF全文
