为了满足半导体激光器能量均匀化的应用需求, 基于ZEMAX光学设计软件设计了一套光束整形匀光系统。采用非球面镜与倒置柱面镜望远系统的透镜组合对单模半导体激光器进行准直, 得到近似高斯圆光斑; 在推导了基模高斯强度分布的匀光投影半径的基础上, 利用ZEMAX优化得到两个非球面镜组成的匀光透镜组, 在一定范围内可获得能量均匀度达96%以上的圆光斑。同时, 实现了一个大功率半导体激光器光纤耦合模块的能量匀化设计, 满足对能量匀化要求较高的应用。结果表明, 该研究为半导体激光器能量均匀化的应用提供了有效方法。

In order to meet the beam homogenization application requirements of laser diodes, a beam homogenization shaping system was designed with ZEMAX optical design software. A collimation system composed of aspheric lenses and inverted cylindrical lenses telescope system was used to get a circular Gaussian beam. On the basis of deducing homogenization projection radius of fundamental mode Gaussian beams, the two-aspheric lens homogenization system was optimized with ZEMAX. The whole system can obtain a circular spot with energy uniformity over 96% at a large range. Meanwhile, the beam homogenization of high power optical fiber couple module was realized, which satisfied the needs of high uniformity in applications. This research provides an effective way for the homogenization applications of laser diodes.