研究了用静电纺丝技术制造微纳气体传感器的方法。采用PVP (Polyvinyl Pyrrolidone)/Zn(Ac)2和PEO(Polyoxyethylene )/Zn(Ac)2两种混合溶液作为原料, 通过电纺喷射获得了复合前驱体纳米纤维; 在空气中加热至500℃去除聚合物, 并使Zn(Ac)2受热分解、氧化获得ZnO纳米纤维; 利用X射线衍射术(XRD)对ZnO纳米纤维进行成分表征; 最后实验检测了ZnO纳米纤维气敏传感器对乙醇和丙酮气体的传感特性。结果显示: 以PVP/Zn(Ac)2、PEO/Zn(Ac)2复合纳米纤维为前驱体制得的ZnO纳米纤维平均直径分别为308 nm、184 nm; 这种纳米纤维经加热氧化可获得高纯度ZnO纳米纤维; 在室温条件ZnO纳米纤维气敏传感器对目标气体传感响应时间小于1 s, 其传感灵敏值随着气体浓度的增大而升高。另外, 以PEO/Zn(Ac)2为前驱体制得的ZnO纳米纤维表面粗糙、比表面积大, 具有较高的传感灵敏值, 对于乙醇、丙酮两种目标气体的最高灵敏值分别为215.69和118.13。得到的结果表明: 静电纺丝技术的引入为半导体微纳气敏传感器的集成制造提供了有效的方法。

The application of electrospinning fabrication technology in micro/nano sensor production was investigated. Mixed solutions of praecursor bodies PVP(Polyvinyl Pyrrlidone)/Zn(Ac)2 and PEO(Polyoxyethylene)/Zn(Ac)2 were used as the electrospinning materials to make a precursor nanofiber. The precursor nanofiber was calcined at 500 °C in the air to remove polymers and the Zn(Ac)2 was thermally decomposed and oxidized into ZnO. X-ray diffraction (XRD) was used to charaterize the components of a ZnO nanofiber. The sensing response of a ZnO nanofibrous gas sensor on the ethanol and acetone vapors were tested. The test results indicate that the average diameters of ZnO nanofiber made from PVP/Zn(Ac)2, PEO/Zn(Ac)2 precursor are 308 nm and 184 nm, respectively. XRD spectrograms show that the ZnO nanofiber with high purity can be obtained from a blended precursor nanofiber through thermal oxidation. The response time of the ZnO nanofibrous sensor on the objective gas is less than 1 s at room temperature and its sensitivity increases with the increment of gas concentration. Furthermore, the ZnO nanofiber made from PEO/Zn(Ac)2 precursor shows a roughness surface, a larger specific surface area and higher sensing sensitivity, and the maximal sensitivity of ZnO nanofibrous gas sensor on ethanol and acetone vapor have been up to 215.69 and 118.13, respectively. This work presents a novel method for the integration fabrication of semiconductor micro/nano gas sensors.