单晶硅分光晶体作为同步辐射光源光束线单色器中常用的部件, 由于它对加工精度的要求越来越高, 所以减小加工过程中产生的残余应变显得尤为重要。介绍了线切割机加工单晶硅晶体的主要过程, 包括晶体定向的原理, 线切割机加工硅分光晶体的方法, 检测加工表面的粗糙度和面形。此外还利用上海光源BL14B线站测量了它的摇摆曲线, 其结果满足设计要求。

As a good diffracted component, single-crystal silicon is commonly used in monochromators of beamline stations in synchrotron radiation facilities. It is significant to find methods to reduce the residual strain during the manufacturing process. The orientation theory is introduced and a reciprocating wire saw machine with diamond is used to manufacture a diffracted single-crystal silicon. Roughness and surface shape of the processing surface are tested and its rocking curve is measured in BL14B station at SSRF. The result shows that the data meet the design requirements.