光学技术, 2014, 40 (4): 339, 网络出版: 2014-06-30
离轴非球面三坐标检测技术
Off-axis aspheric surface measurement by coordinate contour measuring machine
摘要
提出了一种使用三坐标测量机(CMM)测量底面为圆形、矩形、跑道形离轴非球面面形误差的方法。针对离轴非球面的外形特征设计工件坐标系, 规划工件坐标系定位点;利用CMM对离轴非球面进行点触发式自动测量, 得到被测面点云坐标数据; 建立离轴非球面数据处理模型, 得出了面形误差。模拟分析表明, 该测试方法和误差处理模型是正确的, 并用该检测技术完成了离轴非球面粗抛光阶段的加工。
Abstract
A method is proposed to measure off-axis aspherical mirrors with a circular flat base, a rectangular flat base and a family of parallel lines that cut the circular flat base by a coordinate measurement machine (CMM). In response to the base features above, workpiece coordinate system is designed, and the positioning points used to establish the workpiece coordinate system are defined. The 3D-coordinates point-cloud data on the off-axis mirrors are obtained with automatic measurement of single points schema by CMM, and then, the off-axis aspheric surface data processing model for these error corrections is built. Compared with the data by the theoretical model, the surface error of an actual off-axis aspheric surface is obtained. All the pre-polishing processes are guided according to the measurement results.
陈曦, 郭培基, 王建明, 仇谷烽. 离轴非球面三坐标检测技术[J]. 光学技术, 2014, 40(4): 339. CHEN Xi, GUO Peiji, WANG Jianming, QIU Gufeng. Off-axis aspheric surface measurement by coordinate contour measuring machine[J]. Optical Technique, 2014, 40(4): 339.