激光与光电子学进展, 2007, 44 (1): 31, 网络出版: 2007-01-22
金属键合技术及其在光电器件中的应用 下载: 700次
Metallic Bonding Technique and Applications to Optoelectronic Devices
光电器件 金属键合 工艺 表征 应用 垂直腔面发射激光器 optoelectronic devices metallic bonding technique characterization application vertical cavity surface emitting laser
摘要
系统阐述了金属键合的发展概况、基本工艺和方法、表征技术及其在光电器件中的应用。金属键合制备光电器件的一般工艺流程分为三步:蒸镀金属薄膜、键合、腐蚀去除衬底,列举了常用的金属键合方法及其工艺条件;并着重论述了该技术在光电器件特别是垂直腔面发射激光器(VCSEL)器件结构制作中的应用。金属键合可以实现衬底倒扣和改善器件热学性能,而对器件原有的光学性质影响不大。
Abstract
The metallic bonding technique is summarized generally, including its developing status, fundamental process and methods, characterization and application to the optoelectronic devices. The common process of the metallic bonding is expatiated, and it can be divided into three steps: evaporation of metals, bonding and substrate etching. The common methods of metallic bonding and its processing condition are also summed up. Especially, The application in the structure fabrication of optoelectronic devices, such as vertical cavity surface emitting laser(VCSEL) is discussed. Metallic bonding can realize up-down assembly and improve the thermal property. But it has little influence on the original optical property of the device.
谢正生, 吴惠桢, 劳燕锋, 刘成, 曹萌. 金属键合技术及其在光电器件中的应用[J]. 激光与光电子学进展, 2007, 44(1): 31. 谢正生, 吴惠桢, 劳燕锋, 刘成, 曹萌. Metallic Bonding Technique and Applications to Optoelectronic Devices[J]. Laser & Optoelectronics Progress, 2007, 44(1): 31.