提出了一种用于测量微机电系统(MEMS)器件瞬时速度、位移的测量系统。采用激光差动多普勒技术, 检测谐振器在平面内的振动, 测量垂直于系统测量光轴方向的振动速度。并在差动多普勒测量光路的基础上加入了CCD 监测光路, 实时观察被测器件调整过程和振动情况。通过处理电路从光学系统输出的高频信号中提取多普勒信号, 利用Labview和Matlab软件对采集的多普勒信号进行时频分析, 得到被测器件的运动参量。通过对测点的微定位, 对MEMS器件进行整平面的扫描, 得到器件振动的瞬时速度场, 为进一步对MEMS器件的高阶谱振动分析及扭转分析提供了一定的基础和必要的支持。

A system used for testing transient velocities and displacements of the micro-electronic-mechanical system (MEMS) devices is presented. A differential laser Doppler technique is adopted to measure the in-plane vibration of MEMS resonator and vibration velocity which is perpendicular to the optical axis of the measuring system. A CCD camera with imaging system to observe the position adjustment and resonator vibration status is introduced to the optical arrangement. The Doppler frequency is extracted by processing circuit from the high-frequency output of the optical system, and powerful Labview & Matlab are used in time-frequency analysis to measure the movement parameters. In the system, a tiny location device is used to scan the whole plane of the MEMS devices. As a result the transient velocity field, which provides certain basis and necessary support for the higher-order spectral analysis and torsion analysis, is achieved.