光学学报, 2007, 27 (2): 377, 网络出版: 2007-02-26
相位光栅型波前曲率传感器
Wavefront Curvature Sensor with Phase Defocus Grating
自适应光学 波前曲率传感器 相位型散焦光栅 波前测量 adaptive optics wavefront curvature sensor phase defocus grating wavefront measurement
摘要
研制了一套相位光栅型波前曲率传感器。实验结果表明, 相位型散焦光栅能消除零级衍射光的干扰, 正负一级衍射光的衍射效率达到49%。用相差板引进波前畸变, 进行了波前测量实验。用格林函数算法进行了波前恢复, 并和Veeco检测结果进行了比较。制备的光栅型波前曲率传感器测量结果正确, 峰谷值存在10%的误差, 均方根值存在2%的误差。
Abstract
The wavefront curvature sensor comprising a phase defocus grating is designed and fabricated. The influence of zero-order diffraction is prohibited, and the high diffractive efficiency of 49% for the ±1 diffraction orders is verified experimentally. Wavefront deformation is introduced by a phase plate. The initial wavefront measurement experiment is carried out. The Green function algorithm is used for wavefront reconstruction. The reconstructed wavefront is compared with the measurement result of the Veeco interferometer. It is verified that the measurement of the self-designed curvature sensor is correct, the error percent of peak-valley value (PV) is 10%, and the error percent of root mean square (RMS) is 2%.
习锋杰, 许晓军, 王铁志, 姜宗福. 相位光栅型波前曲率传感器[J]. 光学学报, 2007, 27(2): 377. 习锋杰, 许晓军, 王铁志, 姜宗福. Wavefront Curvature Sensor with Phase Defocus Grating[J]. Acta Optica Sinica, 2007, 27(2): 377.